Výsledky vyhledávání - "Mumlyakov, Alexander"

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Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber

Autor: Shibalov, Maksim V., Asharchuk, Ilya M., Epifanov, Evgeniy O., Trofimov, Igor V., Mumlyakov, Alexander M., Minaev, Nikita V., Anufriev, Yuri V., Tarkhov, Michael A.

This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength of 830 nm and a width of 200 nm. This SNSPD is made of a superconduct

Externí odkaz: http://arxiv.org/abs/2402.07592

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Superconducting TSV contact for cryoelectronic devices

Autor: Filippov, Ivan, Anikanov, Alexandr, Rykov, Aleksandr, Mumlyakov, Alexander, Shibalov, Maksim, Trofimov, Igor, Porokhov, Nikolay, Anufriev, Yuriy, Tarkhov, Michael

This work focuses on the fabrication of niobium through silicon vias (TSV) superconductors interconnects. The effect of supercycle of sequential oxidation and chemical etching process on the through-etch wall quality was investigated. It was experime

Externí odkaz: http://arxiv.org/abs/2308.06000

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Wet Scandium Etching for hard mask formation on a silicon substrate

Autor: Bondareva, Julia, Timofeeva, Ekaterina, Anikanov, Alexandr, Krasilnikov, Maxim, Shibalov, Maxim, Sen, Vasily, Mumlyakov, Alexander, Evlashin, Stanislav, Tarkhov, Mikhail

Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of the key issues in achieving a good balance between lithography and etch

Externí odkaz: http://arxiv.org/abs/2110.13639

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