Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Muhtade Mustafa Aqil"'
Publikováno v:
Journal of Nanotechnology, Vol 2017 (2017)
In this paper, pure molybdenum (Mo) thin film has been deposited on blank Si substrate by DC magnetron sputtering technique. The deposition condition for all samples has not been changed except for the deposition time in order to study the influence
Externí odkaz:
https://doaj.org/article/71555b9a29a8498b87fccce30eee74f7
Autor:
Muhtade Mustafa Aqil, Muath Jarrah
Publikováno v:
2022 International Conference on Business Analytics for Technology and Security (ICBATS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::16ab81ff579ee1188a08617b8a7d1e7a
https://doi.org/10.1109/icbats54253.2022.9759075
https://doi.org/10.1109/icbats54253.2022.9759075
Publikováno v:
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM).
A simple and easy method to estimate either compressive or tensile thin film stress that exists within the buckled MEMS bridge structure is presented. An array of tantalum MEMS bridge with buckle profile is fabricated at length 570 μm–1620 μm. Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3cd8a808a5ce133df0b38b09d1c183cc
https://doi.org/10.1109/rsm.2017.8069121
https://doi.org/10.1109/rsm.2017.8069121