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Publikováno v:
2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP).
This paper presents an investigation of a mechanical contact type RF-MEMS switch for VHF band applications. Different contact electrostatically actuated switches were analytically studied and simulated using CoventorWare FEM software. The switches we
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::913242d2d62b7efde5b81a2994738aa7
https://doi.org/10.1109/dtip54218.2021.9568686
https://doi.org/10.1109/dtip54218.2021.9568686
