Zobrazeno 1 - 10
of 23
pro vyhledávání: '"Motoyuki Yamagami"'
Publikováno v:
BUNSEKI KAGAKU. 69:463-470
Autor:
Ayako Shimazaki, Yoshihiro Mori, Mohammad B. Shabani, Norikuni Yabumoto, Kazuo Nishihagi, Harumi Shibata, Yohichi Gohshi, Hikari Takahara, Motoyuki Yamagami
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy. 90:72-82
Vapor phase treatment (VPT) was under investigation by the International Organization for Standardization/Technical Committee 201/Working Group 2 (ISO/TC201/WG2) to improve the detection limit of total reflection X-ray fluorescence spectroscopy (TXRF
Publikováno v:
Journal of Molecular Liquids. 153:2-8
Neutron diffraction with an isotopic substitution technique was used to determine the structure (bond distance, hydration number, and orientational correlation of water) of ion hydration in concentrated aqueous solutions of lithium chloride, nickel c
Autor:
Hiroshi Kohno, Marc Veillerot, Thierry Lardin, Adrien Danel, Dominique Despois, Charles Geoffroy, Motoyuki Yamagami, Nicolas Cabuil
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy. 63:1375-1381
The issues related to the matching between the 3 modes of Total-reflection X-Ray Fluorescence available on the latest generation of commercial equipment: Direct-Total-reflection X-Ray Fluorescence, Sweeping-Total-reflection X-Ray Fluorescence and Vap
Publikováno v:
Solid State Phenomena. 134:269-272
Autor:
Yoshinobu Onizuka, Kousuke Shimizu, Kenichi Uemura, Motoyuki Yamagami, Takashi Yamada, Yoshinori Iizuka, Yoshihiro Mori, Hiroshi Kohno
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy. 59:1277-1282
A new interpretation of the data from Sweeping-TXRF (total reflection X-ray fluorescence) was proposed for the analysis of semiconductor contamination. Formerly, we focused on the accumulated spectrum that represents average concentration. In the pro
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy. 58:2079-2084
A total reflection X-ray fluorescence spectrometer integrated with vapor phase decomposition, VPD-TXRF, was newly developed. This instrument was designed to achieve a minimum footprint, to avoid cross contamination during operation, and to protect pe
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy. 56:2293-2300
Vapor phase decomposition-total-reflection X-ray fluorescence spectrometry (VPD-TXRF) is used in the analysis of whole-surface trace metal contamination on silicon wafers at a very high sensitivity. In VPD-TXRF, locating the exact position of dried r
Autor:
Masahiro Nonoguchi, Tadashi Utaka, Takashi Yamada, Shigeaki Nomura, Kazuo Taniguchi, Shigerou Ikeda, Hisanobu Wakita, Takashi Shoji, Motoyuki Yamagami
Publikováno v:
X-Ray Spectrometry. 28:451-455
A combination of vapor-phase decomposition (VPD) and total reflection x-ray fluorescence (TXRF) was used for the trace analysis of light elements (Na and Al) and transition metals (Fe, Ni, Cu, and Zn). TXRF measurement using the W Mα line was conduc
Autor:
Hisanobu Wakita, Shigerou Ikeda, Takashi Yamada, Yoshihiro Mori, Kazuo Taniguchi, Motoyuki Yamagami, Masahiro Nonoguchi, Tadashi Utaka, Shigeaki Nomura, Takashi Shoji
Publikováno v:
BUNSEKI KAGAKU. 48:1005-1011
気相分解(VPD)を組み合わせた全反射蛍光X線分析(TXRF), VPD/TXRF法によって, Siウェハー上の極微量Na及びAlの分析を行った. Na及びAlの高感度分析を行うために, W-Mα線を用いてTXRF測定を行った.