Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Motoki Yonekura"'
Autor:
Kurihara Yoshiaki, Kosuke Urashima, Shinichirou Sukata, Motoki Yonekura, Takaaki Noudou, Masaya Toba, Hiroshi Masuda, Yoshinori Ejiri
Publikováno v:
2019 Pan Pacific Microelectronics Symposium (Pan Pacific).
Cu particles with an average particle size of 130 nm were found to be suitable for low-temperature metallization. Cu wirings with line/space $(\mathrm{L}/\mathrm{S}) = 150 \mu \mathrm{m}/150 \mu {\mathrm {m}}~and~{\mathrm {L/S}} = 150 \mu m/100 \mu {
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9c8b34057b4cb49fb21dbf0b86e23c08
https://doi.org/10.23919/panpacific.2019.8696671
https://doi.org/10.23919/panpacific.2019.8696671
Autor:
Fumiteru Akamatsu, Atsushi Okazawa, Hiroyuki Takeishi, Akio Kobayashi, Shinya Sawada, Motoki Yonekura, Jun Hayashi, Takashi Machimura, Yoshiaki Kimura
Publikováno v:
The Review of Laser Engineering. 44:745
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::995cf8376845165543c876d36593bcef
https://doi.org/10.2184/lsj.44.11_745
https://doi.org/10.2184/lsj.44.11_745