Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Motohiro Naitou"'
Autor:
Kiyohito Kumagai, Osamu Hosoda, Iwao Watanabe, Motohiro Naitou, Yuu Ohhashi, Kazumitsu Tanaka, Yasushi Kokubo, Takahide Sakata
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 10:2842
A He gas‐phase ion source having a three‐electrode acceleration lens that can change the acceleration energy and magnification independently was developed. This source allows application of acceleration voltages up to 100 kV and extraction voltag
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c8afc9d1d50dc0a9b44e6b2d59cd7a6
https://doi.org/10.1116/1.585970
https://doi.org/10.1116/1.585970
Autor:
Sakata, Takahide, Kumagai, Kiyohito, Naitou, Motohiro, Watanabe, Iwao, Ohhashi, Yuu, Hosoda, Osamu, Kokubo, Yasushi, Tanaka, Kazumitsu
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1992, Vol. 10 Issue 6, p2842-2845, 4p