Zobrazeno 1 - 10
of 35
pro vyhledávání: '"Motofumi Komori"'
Autor:
Norikazu Takeuchi, Genna Hasegawa, Komukai Toshiaki, Takahiro Iwasaki, Masayuki Hatano, Motofumi Komori, Takuya Kono
Publikováno v:
Novel Patterning Technologies 2023.
Autor:
Sachiko Kobayashi, Satoshi Mitsugi, Katsuyoshi Kodera, Kazuya Fukuhara, Anupam Mitra, Koki Ueha, Katsuya Abe, Motofumi Komori, Shingo Kanamitsu, Takuya Kono
Publikováno v:
DTCO and Computational Patterning.
Autor:
Takahiro Iwasaki, Hirokazu Miyoshi, Anupam Mitra, Masayuki Hatano, Kazuya Fukuhara, Motofumi Komori, Takuya Kono, Tetsuro Nakasugi
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Autor:
Tetsuro Nakasugi, Kazuya Fukuhara, Motofumi Komori, Soichi Inoue, Koji Hashimoto, Ryoichi Inanami
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Autor:
Motofumi Komori, Sadanori Arae, Soichi Inoue, Tetsuro Nakasugi, Koji Hashimoto, Ryoichi Inanami, Kazuya Fukuhara
Publikováno v:
Novel Patterning Technologies 2021.
We have developed Multi-Field Imprint (MFI) technology to improve the productivity of for nano-imprint lithography (NIL). Using the template having the imprinting size of 46 mm x 28 mm for MFI and the latest NIL system NZ2C (Canon Corp.), we successf
Autor:
Yong-Taik Kim, Hirokazu Kato, S. Inoue, Motofumi Komori, Hirotaka Tsuda, Kei Kobayashi, A. Mitra, K. Matasunaga, Hiroshi Tokue, Sachiko Kobayashi, Masanobu Saito, Tetsuro Nakasugi, T. Imamura, Wooyung Jung, Takeharu Motokawa, Tatsuhiko Higashiki, T. Komukai, Kazuya Fukuhara, J. Cho, Masamitsu Itoh, Masayuki Hatano, K. Takahata, Shingo Kanamitsu, Takuya Kono, Kohji Hashimoto
Publikováno v:
2018 IEEE International Electron Devices Meeting (IEDM).
We developed a nanoimprint lithography (NIL) technology including NIL system, template and resist process for half pitch (hp) 14 nm direct pattering. The latest NIL system NZ2C shows the mix and match overlay (MMO) of 3.4 nm ( $3\sigma$ ) and the tem
Autor:
Motofumi Komori, Takuya Kono, Hirotaka Tsuda, Wooyung Jung, Tetsuro Nakasugi, Hirokazu Washida
Publikováno v:
Novel Patterning Technologies 2018.
Nanoimprint lithography (NIL) is regarded as one of the candidates for next generation lithography toward singlenanometer manufacturing. Among the wide variety of imprint methods, Jet and Flash Imprint Lithography (J-FIL) process is the most suitable
Autor:
Tetsuro Nakasugi, Ji-Young Im, Kazuhiro Washida, Hirotaka Tsuda, Takuya Kono, Sachiko Kobayashi, Kyoji Yamashita, Motofumi Komori
Publikováno v:
Novel Patterning Technologies 2018.
Technologies for pattern fabrication using imprint process are being developed for various devices. Nanoimpirnt lithography (NIL) is an attractive and promising candidate for its pattern fidelity toward finer device fabrication without using double p
Autor:
Ji-Young Im, Hirotaka Tsuda, Ryoichi Inanami, Kyoji Yamashita, Takuya Kono, Sachiko Kobayashi, Shimon Maeda, Motofumi Komori, Kazuhiro Washida
Publikováno v:
SPIE Proceedings.
Technologies for pattern fabrication using imprint process are being developed for various devices. Nanoimpirnt lithography (NIL) is an attractive and promising candidate for its pattern fidelity toward finer device fabrication without using double p