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Gas-mediated focused electron beam induced etching (FEBIE) and deposition (FEBID), collectively referred to here as FEBIED, permit nanoscale modification of surface material via chemical reactions involving electron-dissociated precursor molecules. E
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______363::efbbaeb711b6d4d6f610198dc7b168db
https://hdl.handle.net/10453/31008
https://hdl.handle.net/10453/31008
Autor:
Lehner BAE; Kavli Institute of Nanoscience, Delft University of Technology, Delft 2629HZ, The Netherlands., Benz D; Chemical Engineering, Delft University of Technology, Delft 2629HZ, The Netherlands., Moshkalev SA; Center of Semiconductor Components and Nanotechnologies, University of Campinas, Campinas, Sao Paulo 13083-870, Brazil., Meyer AS; Department of Biology, University of Rochester, Rochester, New York 14627, United States., Cotta MA; Laboratory of Nano and Biosystems, Department of Applied Physics, University of Campinas, Campinas, Sao Paulo 13083-859, Brazil., Janissen R; Kavli Institute of Nanoscience, Delft University of Technology, Delft 2629HZ, The Netherlands.
Publikováno v:
ACS applied nano materials [ACS Appl Nano Mater] 2021 Aug 27; Vol. 4 (8), pp. 8334-8342. Date of Electronic Publication: 2021 Aug 16.
Autor:
Alaferdov AV; Center for Semiconductor Components and Nanotechnologies, University of Campinas, Campinas, SP, 13083-870, Brazil.; The 'Gleb Wataghin' Institute of Physics, University of Campinas, Campinas, SP, 13083-859, Brazil., Savu R; Center for Semiconductor Components and Nanotechnologies, University of Campinas, Campinas, SP, 13083-870, Brazil., Fantini C; Department of Physics, Federal University of Minas Gerais, Belo Horizonte, MG, 31270-901, Brazil., Cançado LG; Department of Physics, Federal University of Minas Gerais, Belo Horizonte, MG, 31270-901, Brazil., Moshkalev SA; Center for Semiconductor Components and Nanotechnologies, University of Campinas, Campinas, SP, 13083-870, Brazil.
Publikováno v:
Journal of physics. Condensed matter : an Institute of Physics journal [J Phys Condens Matter] 2020 Jun 19; Vol. 32 (38). Date of Electronic Publication: 2020 Jun 19.
Autor:
Singh AK; Center for Semiconductor and Nanotechnology Center (CCS Nano), University of Campinas, Sao Paulo, Brazil. School of Physical Sciences, Jawaharlal Nehru University, New Delhi, India., Yadav AN, Srivastava A, Haldar KK, Tomar M, Alaferdov AV, Moshkalev SA, Gupta V, Singh K
Publikováno v:
Nanotechnology [Nanotechnology] 2019 Dec 13; Vol. 30 (50), pp. 505704. Date of Electronic Publication: 2019 Sep 09.
Autor:
Singh AK; Center for Semiconductor and Nanotechnology Components, UNICAMP SP Brazil ashwanikumarsingh143@gmail.com.; School of Physical Sciences, Jawaharlal Nehru University New Delhi India., Prasad J; School of Physical Sciences, Jawaharlal Nehru University New Delhi India., Azad UP; School of Material Science and Technology IIT BHU Varanasi India., Singh AK; School of Material Science and Technology IIT BHU Varanasi India., Prakash R; School of Material Science and Technology IIT BHU Varanasi India., Singh K; School of Physical Sciences, Jawaharlal Nehru University New Delhi India., Srivastava A; Department of Physics, TD PG College, VBS Purvanchal University Jaunpur India., Alaferdov AA; Center for Semiconductor and Nanotechnology Components, UNICAMP SP Brazil ashwanikumarsingh143@gmail.com., Moshkalev SA; Center for Semiconductor and Nanotechnology Components, UNICAMP SP Brazil ashwanikumarsingh143@gmail.com.
Publikováno v:
RSC advances [RSC Adv] 2019 Jul 17; Vol. 9 (39), pp. 22232-22239. Date of Electronic Publication: 2019 Jul 17 (Print Publication: 2019).
Autor:
Rackauskas S; Department of Physics, Kaunas University of Technology, Studentu St. 50, LT-51368, Kaunas, Lithuania. Institute of Materials Science, Kaunas University of Technology, K. Barsausko St. 59, LT-51423, Kaunas, Lithuania., Rackauskas T, Alaferdov A, Vaz A, Savu R, Moshkalev SA
Publikováno v:
Nanotechnology [Nanotechnology] 2019 Jun 14; Vol. 30 (24), pp. 245203. Date of Electronic Publication: 2019 Feb 19.
Autor:
Kumar R; Centre for Semiconductor Components and Nanotechnology (CCS-Nano), University of Campinas (UNICAMP), Campinas, 1308-870 Sao Paulo, Brazil. Electronic address: rajeshbhu1@gmail.com., da Silva ETSG; Department of Analytical Chemistry, Institute of Chemistry, University of Campinas (UNICAMP), P.O. Box 6154, Campinas, 13084-974 Sao Paulo, Brazil., Singh RK; School of Physical & Material Sciences, Central University of Himachal Pradesh (CUHP), Kangra, Dharamshala, H.P. 176215, India., Savu R; Centre for Semiconductor Components and Nanotechnology (CCS-Nano), University of Campinas (UNICAMP), Campinas, 1308-870 Sao Paulo, Brazil., Alaferdov AV; Centre for Semiconductor Components and Nanotechnology (CCS-Nano), University of Campinas (UNICAMP), Campinas, 1308-870 Sao Paulo, Brazil., Fonseca LC; Laboratory of Solid State Chemistry, Institute of Chemistry, Universidade Estadual de Campinas, 13083-970 Campinas, São Paulo, Brazil., Carossi LC; Department of Analytical Chemistry, Institute of Chemistry, University of Campinas (UNICAMP), P.O. Box 6154, Campinas, 13084-974 Sao Paulo, Brazil., Singh A; Department of Physics, Sam Higginbottom University of Agriculture Technology and Sciences, Naini, Allahabad, U.P. 211007, India., Khandka S; Department of Physics, Sam Higginbottom University of Agriculture Technology and Sciences, Naini, Allahabad, U.P. 211007, India., Kar KK; Advanced Nanoengineering Materials Laboratory, Department of Mechanical Engineering and Materials Science Programme, Indian Institute of Technology Kanpur, Kanpur 208016, UP, India., Alves OL; Laboratory of Solid State Chemistry, Institute of Chemistry, Universidade Estadual de Campinas, 13083-970 Campinas, São Paulo, Brazil., Kubota LT; Department of Analytical Chemistry, Institute of Chemistry, University of Campinas (UNICAMP), P.O. Box 6154, Campinas, 13084-974 Sao Paulo, Brazil., Moshkalev SA; Centre for Semiconductor Components and Nanotechnology (CCS-Nano), University of Campinas (UNICAMP), Campinas, 1308-870 Sao Paulo, Brazil. Electronic address: stanisla@unicamp.br.
Publikováno v:
Journal of colloid and interface science [J Colloid Interface Sci] 2018 Apr 01; Vol. 515, pp. 160-171. Date of Electronic Publication: 2018 Jan 08.
Autor:
Kumar R; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP), Campinas 13083-870, Brazil. Electronic address: rajeshbhu1@gmail.com., Joanni E; Centre for Information Technology Renato Archer (CTI), Campinas 13069-901, Brazil., Singh RK; School of Physical and Material Sciences, Central University of Himanchal Pradesh (CUHP), Kangra, Dharamshala HP-176215, India., da Silva ETSG; Department of Analytical Chemistry, Institute of Chemistry, University of Campinas, (UNICAMP), Campinas 13084-971, Brazil., Savu R; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP), Campinas 13083-870, Brazil., Kubota LT; Department of Analytical Chemistry, Institute of Chemistry, University of Campinas, (UNICAMP), Campinas 13084-971, Brazil., Moshkalev SA; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP), Campinas 13083-870, Brazil. Electronic address: stanisla@unicamp.br.
Publikováno v:
Journal of colloid and interface science [J Colloid Interface Sci] 2017 Dec 01; Vol. 507, pp. 271-278. Date of Electronic Publication: 2017 Aug 03.
Autor:
Kumar R; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP) , 13083-870 Campinas, Sao Paulo, Brazil., Singh RK; School of Physical & Material Sciences, Central University of Himachal Pradesh (CUHP) , Kangra, Dharamshala, Himachal Pradesh 176215, India., Vaz AR; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP) , 13083-870 Campinas, Sao Paulo, Brazil., Savu R; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP) , 13083-870 Campinas, Sao Paulo, Brazil., Moshkalev SA; Centre for Semiconductor Components and Nanotechnology (CCS Nano), University of Campinas (UNICAMP) , 13083-870 Campinas, Sao Paulo, Brazil.
Publikováno v:
ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2017 Mar 15; Vol. 9 (10), pp. 8880-8890. Date of Electronic Publication: 2017 Mar 06.