Zobrazeno 1 - 10
of 25
pro vyhledávání: '"Morio Yagihara"'
Autor:
Shinichi Kanna, Morio Yagihara, Tadayoshi Kokubo, Sanjay Malik, Kazuyoshi Mizutani, Stephanie Dilocker, Shoichiro Yasunami, Shiro Tan, Yasumasa Kawabe
Publikováno v:
Journal of Photopolymer Science and Technology. 16:595-600
Resist materials for 157 nm lithography is believed to be one of the key technology for producing patterns below 70 nm. Many different types of fluorine-containing polymer platforms have been energetically pursued by a number of researchers, and some
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55a78a6d6a8c309d577af5bfc9fda176
https://doi.org/10.2494/photopolymer.16.595
https://doi.org/10.2494/photopolymer.16.595
Autor:
Morio Yagihara, Kenichiro Sato, Hajime Nakao, Kunihiko Kodama, Yasumasa Kawabe, Toshiaki Aoai
Publikováno v:
Journal of Photopolymer Science and Technology. 12:477-486
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7501930e09420e3df7b631b283851247
https://doi.org/10.2494/photopolymer.12.477
https://doi.org/10.2494/photopolymer.12.477
Publikováno v:
Journal of Photopolymer Science and Technology. 10:387-395
The relationship between the higher structure of resist polymers, such as novolak (NVK) and poly(hydroxystyrene) (PHS), and their alkali dissolution and dissolution inhibition characteristics were investigated. From the calculations of the polymers w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::91239667933e4dfae5597e8d4c872503
https://doi.org/10.2494/photopolymer.10.387
https://doi.org/10.2494/photopolymer.10.387
Publikováno v:
ChemInform. 23
A series of lithium tellurocarboxylates (1) were obtained as orange to red oils containing an equivalent of THF and LiCl from the reaction of acyl chlorides with lithium telluride. The salts (1) are extremely sensitive towards oxygen. Lithium benzene
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2ec278d43a7168178d0b9636ec694b0
https://doi.org/10.1002/chin.199228230
https://doi.org/10.1002/chin.199228230
Publikováno v:
Phosphorus, Sulfur, and Silicon and the Related Elements. 67:27-32
A series of lithium tellurocarboxylates (1) were obtained as orange to red oils containing an equivalent of THF and LiCl from the reaction of acyl chlorides with lithium telluride. The salts (1) are extremely sensitive towards oxygen. Lithium benzene
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::032d711b880c9495eaef2c3453000ed1
https://doi.org/10.1080/10426509208045815
https://doi.org/10.1080/10426509208045815
Autor:
Morio Yagihara, Stephanie Dilocker, Shiro Tan, Sanjay Malik, Tadayoshi Kokubo, Shinichi Kanna, Shoichiro Yasunami, Kazuyoshi Mizutani, Yasumasa Kawabe
Publikováno v:
Advances in Resist Technology and Processing XX.
Resist materials for 157nm lithography is believed to be one of the key technology for producing patterns below 70nm. Many different types of fluorine-containing polymer platforms have been energetically pursued by a number of researchers, and some o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f20c4365846954ed0d48c38528e15bbe
https://doi.org/10.1117/12.485185
https://doi.org/10.1117/12.485185
Autor:
Yasumasa Kawabe, Kenichiro Sato, Toshiaki Aoai, Morio Yagihara, Hajime Nakao, Kunihiko Kodama
Publikováno v:
SPIE Proceedings.
Synthesis of new alicyclic (meth)acrylate polymers containing androstane moieties, especially cholic acid derivatives, and their characteristics were investigated for 193nm single layer resists. Among the derivatives, a work of adhesion, Ohnishi and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5cfce4a6a7af186697f91088381b30fe
https://doi.org/10.1117/12.350212
https://doi.org/10.1117/12.350212
Publikováno v:
SPIE Proceedings.
A study for a new organic bottom antireflective coating (BARC) composition is described. A structural design of a light-absorbing dye was most important because dye structure not only plays a role in eliminating reflection from a substrate but also s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef6d1a32795497d379bba8682b6f01e4
https://doi.org/10.1117/12.350234
https://doi.org/10.1117/12.350234
Publikováno v:
Chemistry Letters. 3:1015-1019
Photolytic decomposition of 2-diazophenol in methanol afforded 6-hydroxy-6-methoxy-2-(2-hydroxyphenylazo)fulvene, guaiol, phenol, and dimer of methyl cyclopentadienecarboxylate. The decomposition in water gave 6,6-dihydroxyfulvene derivative. Thermal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::795941d51a2836767622e8d5a3cc0d64
https://doi.org/10.1246/cl.1974.1015
https://doi.org/10.1246/cl.1974.1015
Publikováno v:
Bulletin of the Chemical Society of Japan. 51:2131-2135
The sensitized photooxidation of cycloheptatriene (tropilidene) in methanol afforded (4π+2π) cycloadduct; 8,9-dioxabicyclo[3.2.2]-2,6-nonadiene (1), 6-hydroxy-2,4-cycloheptadienone and 6-oxoheptadienal presumably derived from (6π+2π) cycloadduct,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d59265e40e87ed7f796ca927a3cff7bb
https://doi.org/10.1246/bcsj.51.2131
https://doi.org/10.1246/bcsj.51.2131