Zobrazeno 1 - 10
of 113
pro vyhledávání: '"Morio Inoue"'
Autor:
Morio Inoue, Takehisa Chuma, Hideki Fujimoto, Terumi Tanaka, Yasuhiro Gunji, Hideki Nishiya, Seiji Uto
Publikováno v:
Journal of the Japan Veterinary Medical Association. 66:138-142
Publikováno v:
Materials Science in Semiconductor Processing. 3:221-225
Boron ion implantation into pre-amorphized silicon is studied. Pre-amorphization is performed either by F + or Si + implantation prior to B + implantation at 10 keV with 3×10 15 ions/cm 2 . Broadening of the boron profile can be suppressed markedly
Autor:
Isao Yamada, Tadashi Kokubo, Morio Inoue, Gikan H. Takaoka, Fumiaki Miyaji, Yasuo Suzuki, Masakazu Kawashita
Publikováno v:
Journal of Non-Crystalline Solids. 255:140-148
Yttrium-containing glass microspheres are already used clinically for radiotherapy of cancers, since the microspheres are activated to β-emitters by neutron bombardment and have a high chemical durability. The microspheres can irradiate cancer direc
Autor:
Ken-ichi Sano, Morio Inoue, Toshinori Takagi, Jun Takada, Masanori Watanabe, Katsuhiro Yokota, Toshinobu Nakao
Publikováno v:
Applied Surface Science. :663-669
We have developed a two-stage deposition technique to fabricate copper–phthalocyanine (Cu–Pc) thin films with good crystallinity and a molecularly flat surface. The Cu–Pc thin films were grown on mica substrates using an ionized cluster beam (I
Autor:
Tohru Hara, Sohtaro Oshima, Kohei Sekine, Morio Inoue, Taira Kitamura, Kenji Kajiyama, Tomoaki Yoneda, Takeo Kihana, Yasuo Kakizaki
Publikováno v:
Journal of The Electrochemical Society. 144:L78-L81
The delamination of thin silicon layers by ion implantation and annealing has been studied in H{sup +} implanted silicon layers. Hydrogen ions are implanted into a (100) p-silicon layer through a 100 nm thick oxide layer at 100 keV with different dos
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 121:1-6
Ion Engineering Center Corp. (IECC) and Ion Engineering Research Institute Corp. (IERIC) established in 1988 in new Kansai Science City in Japan are introduced. Their structure, equipment and R & D activities are described in the view point of the pe
Autor:
Morio Inoue
Publikováno v:
IEEJ Transactions on Power and Energy. 117:1509-1512
Publikováno v:
Journal of The Electrochemical Society. 140:2975-2981
Effects of top-oxidation on the reliability of oxide/nitride/oxide (ONO) stacked films have been investigated for different oxidation methods. The leakage current electric field acceleration factor (β) of mean time to failure, and reliability of ONO
Autor:
Genshu Fuse, Katsuya Ishikawa, Morio Inoue, Yoshiki Fukuzaki, Takashi Namura, Masakatsu Yoshida, Norishige Aoki
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 74:306-310
Ion implantation charging has been studied by evaluation of the threshold voltage shift (ΔVt) of EEPROM devices. The threshold voltage shifted proportionally with the variation of the electron emission current. This method allows the uniformity of c
Publikováno v:
IEEE Transactions on Electron Devices. 40:2211-2215
A repair technique for shifter defects on phase shifting masks is described. It is based on the spin-coating of silicon-containing resist on the entire mask, electron beam exposure, and development. The new repair technique is quite simple because it