22-nm Half-pitch extreme ultraviolet node development at the SEMATECH Berkeley microfield exposure tool

Autor: Naulleau, Patrick P., Anderson, Christopher N., Chiu, Jerrin, Denham, Paul, George, Simi, Goldberg, Kenneth A., Goldstein, Michael, Hoef, Brian, Hudyma, Russ, Jones, Gideon, Koh, Chawon, Fontaine, Bruno La, Ma, Andy, Montgomery, Warren, Niakoula, Dimitra, Park, Joo-on, Wallow, Tom, Wurm, Stefan

Publikováno v: In Microelectronic Engineering 2009 86(4):448-455

ICIN 2016 : innovations in clouds, internet, and networks

Autor: Montgomery, Warren, Crespi, Noel, Bertin, Emmanuel

Publikováno v: IEEE Communications Magazine
IEEE Communications Magazine, Institute of Electrical and Electronics Engineers, 2016, 54 (8), pp.8-8. ⟨10.1109/MCOM.2016.7537168⟩

National audience; The 19th ICIN conference was held March 1-3 in Paris, France, with the support of Orange, Nokia, Deutsche Telekom, Mitel, and UPMC University. The conference attracted 186 delegates from 22 countries representing approximately 57 d

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::36c298810d1b57f0691f0b5d02880781
https://hal.archives-ouvertes.fr/hal-01445618

High carbon fullerene based spin-on organic hardmask.

Autor: Dawson, Guy, Brown, Alan G., McClelland, Alexandra, Lada, Tom, Montgomery, Warren, Robinson, Alex P. G.

Publikováno v: Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-10, 10p

The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development

Autor: Naulleau, Patrick, Anderson, Christopher, Baclea-an, Lorie Mae, Denham, Paul, George, Simi, Goldberg, Kenneth A., Hoef, Brian, Jones, Gideon, McClinton, Brittney, Miyakawa, Ryan, Montgomery, Warren, Rekawa, Seno, Wallow, Tom

Publikováno v: Naulleau, Patrick; Anderson, Christopher; Baclea-an, Lorie Mae; Denham, Paul; George, Simi; Goldberg, Kenneth A.; et al.(2010). The SEMATECH Berkeley MET: Bridging the gap to 16-nm half pitch development. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/2sq373rp

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od_______325::346414ba821f788672eda3bc46c46aa4
http://www.escholarship.org/uc/item/2sq373rp

Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.