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Autor:
Dvoretckaia Liliia, Mozharov Alexey, Komarov Sergey, Vyacheslavova Ekaterina, Moiseev Eduard, Fedorov Vladimir, Mukhin Ivan
Publikováno v:
St. Petersburg Polytechnical University Journal: Physics and Mathematics, Vol 17, Iss 3 (2024)
This article presents the technology for the formation of optical microcavities based on the GaP(NAs) semiconductor material system on silicon. For the first time, a plasma etching mode which ensures the achievement of an aspect ratio of 5:1 and low
Externí odkaz:
https://doaj.org/article/d9c0881f290a4f6b9b2f4a4f49ff0a74
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Akademický článek
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Autor:
Bakhrushina EO; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Mikhel IB; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Buraya LM; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Moiseev ED; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Zubareva IM; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia.; Department of Pharmacology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Belyatskaya AV; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Evzikov GY; Department of Nervous Diseases and Neurosurgery, N.V. Sklifosovsky Institute of Clinical Medicine, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Bondarenko AP; Clinical Center VitaMed, Moscow 125319, Russia., Krasnyuk II Jr; Department of Analytical, Physical and Colloidal Chemistry, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia., Krasnyuk II; Department of Pharmaceutical Technology, A.P. Nelyubin Institute of Pharmacy, I.M. Sechenov First Moscow State Medical University (Sechenov University), Moscow 119048, Russia.
Publikováno v:
Gels (Basel, Switzerland) [Gels] 2024 Jan 05; Vol. 10 (1). Date of Electronic Publication: 2024 Jan 05.