Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Mohler Kacee Ouellette"'
Autor:
Mike Radler-Carol, Jason Niu, Brian G. Landes, Jerry L. Hahnfeld, Dorie Yontz, J. P. Quintana, Sebring Lucero, Brandon Kern, Danny King, Ted Stokich, Steve Weigand, Mohler Kacee Ouellette
Publikováno v:
MRS Proceedings. 766
The continual drive for faster interconnects requires the development of new interlayer dielectricmaterials with k values less than 2.1. Porous SiLKTM semiconductor dielectric resin wasdeveloped to achieve these low dielectric constants by introducin