Ultra-fast CV methods (< 10µs) for interface trap spectroscopy and BTI reliability characterization using MOS capacitors

Autor: Mota Frutuoso, Tadeu, Garros, Xavier, Lugo-Alvarez, José, Kom Kammeugne, Roméo, Mohgouk Zouknak, Louis David, Viey, Abygaël, Vandendaele, William, Ferrari, Philippe, Gaillard, Fred

Publikováno v: IEEE International Reliability Physics Symposium (IRPS 2022)
IEEE International Reliability Physics Symposium (IRPS 2022), Mar 2022, Dallas, United States. ⟨10.1109/IRPS48227.2022.9764550⟩
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International audience; Two Ultra-Fast capacitance characterization methods based on the displacement current measure are explored for MOS capacitance devices. The first method measure the variation of charge obtained from several 100ns short pulses

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::13a5e89e482ad964495f897e131baddb
https://doi.org/10.1109/irps48227.2022.9764550