Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Mohd Faizal Aziz"'
Publikováno v:
Journal of Nanotechnology, Vol 2017 (2017)
In this paper, pure molybdenum (Mo) thin film has been deposited on blank Si substrate by DC magnetron sputtering technique. The deposition condition for all samples has not been changed except for the deposition time in order to study the influence
Externí odkaz:
https://doaj.org/article/71555b9a29a8498b87fccce30eee74f7
Publikováno v:
Sains Malaysiana. 49:3081-3087
Porous nanocrystalline silicon (pnc-Si) membrane is mainly studied as a blood filtration membrane, mimicking the glomerulus filtration membrane of a human kidney. However, the pnc-Si material itself is not hemocompatible and enormous membrane area to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce8a4b5d670ebce58c6b839468cbc4e5
https://doi.org/10.17576/jsm-2020-4912-20
https://doi.org/10.17576/jsm-2020-4912-20
Publikováno v:
Thin Solid Films. 665:17-28
Molybdenum (Mo) thin films are widely used in microelectromechanical systems (MEMS) applications. Mo bilayer deposition by direct current (DC) magnetron sputtering has been proposed in order to attain the desired smooth surface, small in-plane tensil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::07b7d9a4c1300d1f29fdd5779a775558
https://doi.org/10.1016/j.tsf.2018.08.043
https://doi.org/10.1016/j.tsf.2018.08.043
Autor:
Jumril Yunas, Muhammad Fahmi bin Jaafar, Mohd Faizal Aziz, Rhonira Latif, Ahmad Rifqi Md Zain, Burhanuddin Yeop Majlis
Publikováno v:
International Journal of Refractory Metals and Hard Materials. 92:105314
High melting point refractory tantalum (Ta) metal is frequently grown into thin film layer for many applications in biomedical implants, microelectronic devices and micro-level mechanical systems. Tantalum growth mechanism is still in debate and the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e4555379c6ab2053f47ae1be7f5a8c3
https://doi.org/10.1016/j.ijrmhm.2020.105314
https://doi.org/10.1016/j.ijrmhm.2020.105314
Publikováno v:
2014 IEEE International Conference on Semiconductor Electronics (ICSE2014).
The material selection for membrane is important in designing a microheater. A membrane is used as an insulator layer to prevent heat dissipation from the microheater to the substrate. At the same time, the thermal characteristic of the microheater i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd3f2d65f45de12a7c0c7f694d0303a9
https://doi.org/10.1109/smelec.2014.6920845
https://doi.org/10.1109/smelec.2014.6920845
Publikováno v:
2014 IEEE International Conference on Semiconductor Electronics (ICSE2014).
Aluminum nitride thin film depositions at a low temperature become one of the most promising fields in micro-electro mechanical systems and in the semiconductor industry; because of its good compatibility with designs on silicon substrates, its mecha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0f5fbc6ba57a9678a2d7701c8e8169ae
https://doi.org/10.1109/smelec.2014.6920798
https://doi.org/10.1109/smelec.2014.6920798