Zobrazeno 1 - 10
of 23
pro vyhledávání: '"Mohanraj Soundara"'
Autor:
Aslam, Muhammad Zubair, Jeoti, Varun, Karuppanan, Saravanan, Pandian, Mohanraj Soundara, Ferrer, Eloi Marigo, Suresh, Kasyap
Publikováno v:
In Sensors and Actuators: A. Physical 1 October 2020 313
Autor:
Regis Arul Raj, Manimaran Subramaniam, E. Marigo, Teng Hwang Tan, Mohanraj Soundara-Pandian, Nor Shazwani
Publikováno v:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
This paper presents the evaluation of Film Assisted Molding (FAM) technology on Piezoelectric micromachined ultrasonic transducers (PMUT) arrays. Film Assisted Molding (FAM) technology can meet the requirement of MEMS exposed windows packaging with l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a326f5af7645ac1aa346f1500c83e98f
https://doi.org/10.1109/mems51782.2021.9375366
https://doi.org/10.1109/mems51782.2021.9375366
Autor:
E. Marigo, Loh Annie, Nor Shazwani, Anis Amiera, Muhammad Nur Azuan, Chan Buan Fei, Mohanraj Soundara-Pandian
Publikováno v:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
The focus of this paper is to present a comparative study for highly dense arrays of Piezoelectric Micromachined Ultrasonic Transducers (PMUT), manufactured using a Aluminium Nitride (AlN) and emerging Aluminium Scandium Nitride (Al20%ScN) thin films
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::789dc66a7d28d133cf49063c9c93bd29
https://doi.org/10.1109/mems51782.2021.9375371
https://doi.org/10.1109/mems51782.2021.9375371
Autor:
Jamil Din, Ayman Ahmed, Jazril Bin, Mohamed Atef, Nor Shazwani Binti Roslan, Ahmed Yasser, E. Marigo, Mohanraj Soundara-Pandian, Ali Fawzy
Publikováno v:
2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC).
The conceptual design and measurement of a monolithic bulk acoustic wave (BAW) oscillator with conventional plastic QFN packaging is presented. The unique Silterra technology allows the integration of high frequency BAW resonators on top of a standar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4982f299540cd3b6ed893838a34463d8
https://doi.org/10.1109/fcs.2019.8855999
https://doi.org/10.1109/fcs.2019.8855999
Autor:
Varun Jeoti, Kasyap Suresh, Saravanan Karuppanan, Mohanraj Soundara Pandian, Muhammad Zubair Aslam, Eloi Marigo Ferrer
Publikováno v:
Sensors and Actuators A: Physical. 313:112202
In this work, a CMOS compatible surface acoustic wave (SAW) device has been simulated and analyzed on SiO2/AlN/SiO2/Si. The simulation results have been used to characterize a typical fabricated device as well. The phase velocity, coupling coefficien
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::32c87300a96b5e6d00b2489c8f7ca81c
https://doi.org/10.1016/j.sna.2020.112202
https://doi.org/10.1016/j.sna.2020.112202
Autor:
J. Mufioz, V. Tsanov, Arantxa Uranga, E. Marigo, F. Torres, Mohanraj Soundara-Pandian, N. Bamiol
Publikováno v:
2018 IEEE International Frequency Control Symposium (IFCS).
In this paper, an AlN piezoelectric micromachined ultrasonic transducer (PMUT) compatible with pre-processed CMOS substrate is presented. Compared to traditional PMUTs, given that this one is on top of a CMOS pre-processed wafer, it will provide bene
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5abbcde1e6ed24d51fec1d54061be968
https://doi.org/10.1109/fcs.2018.8597560
https://doi.org/10.1109/fcs.2018.8597560
Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging
Autor:
Mohanraj Soundara Pandian, Eloi Marigo Ferrer, Arantxa Uranga, Wee Song Tay, Nuria Barniol, Chan Buan Fei
Publikováno v:
2018 IEEE Micro Electro Mechanical Systems (MEMS).
A detailed reliability study on monolithic CMOS-MEMS resonator devices with zero level packaging (ZLP) is reported in this paper. Whilst many methods have been reported to co-integrate MEMS with CMOS circuits in the same die, very few have addressed
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8de0dee68b7f0b826ccabc78aefb73f7
https://doi.org/10.1109/memsys.2018.8346613
https://doi.org/10.1109/memsys.2018.8346613
Autor:
Chan Buan Fei, Nur Faatyhah Binti Shaari, Jazril Bin, Maheshlal Goutham, Mugilan Gopal Krishnan, Jamil Din, Eloi Marigo, Mohanraj Soundara, Anis Amiera Binti Mohd Radzi
Publikováno v:
2017 IEEE Asia Pacific Microwave Conference (APMC).
A detailed study on the improved electrical properties of piezoelectric thin film AlN device comparing an integration of reflectors with different materials. A low acoustic impedance material with a range between 25E6 kg/m3·s to 35E6 kg/m3·s and an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::18e16dfcfe56713e2a9cb722ade95c31
https://doi.org/10.1109/apmc.2017.8251693
https://doi.org/10.1109/apmc.2017.8251693
Autor:
Marti Riverola, Nuria Barniol, Guillermo Sobreviela, F. Torres, E. Marigo, Gabriel Vidal-Alvarez, Arantxa Uranga, Mohanraj Soundara-Pandian
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
In this paper we present a 0-level package NEMS-on-CMOS resonator developed at SilTerra (Malaysia) for low cost frequency references. The characterization of the capacitively coupled resonator shows the coexistence of high order nonlinear terms that,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb5df3e1a807e7bd593ba47f29cf2891
https://doi.org/10.1109/transducers.2017.7994439
https://doi.org/10.1109/transducers.2017.7994439
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
This paper reports on the fabrication of an AlN SAW resonator above a commercial CMOS technology using the SilTerra MEMS on CMOS process platform. As a proof of concept, a sustaining amplifier, placed in the same substrate, along with the SAW, has be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2cdc1dfbe30ef9fd0d6f737e9600e5ed
https://doi.org/10.1109/transducers.2017.7994445
https://doi.org/10.1109/transducers.2017.7994445