Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Mizue Mizojiri"'
Publikováno v:
MHS
In this paper, we proposed a new fabrication method of thick film structure which has rectangular cross-sectional shape. This fabrication method utilized a new sputtering jig consisting of substrate and spacer units. The surface level of spacer unit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::710b3fde2ba0822847e35b7b35a98d35
https://doi.org/10.1109/mhs.2014.7006094
https://doi.org/10.1109/mhs.2014.7006094
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2014:J2220102
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3fbb5d7a268137a2cfd753ad256d58d8
https://doi.org/10.1299/jsmemecj.2014._j2220102-
https://doi.org/10.1299/jsmemecj.2014._j2220102-