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Autor:
Mitsuo Okamato, Kenji Fukuda, Teruyuki Yashima, Kenji Suzuki, Shinsuke Harada, Junji Senzaki, Makoto Katou, Akimasa Kinoshita, Fukuyoshi Morigasa, Shin Ichi Nishizawa, Takuo Isii, Tomoyoshi Endou
Publikováno v:
Japanese Journal of Applied Physics. 46:5342-5344
Rapid thermal annealing (RTA) on areas with diameters as large as 2 in. at high temperatures using hybrid super-RTA (HS-RTA) equipment is performed in this study. The HS-RTA equipment consists of an infrared annealing unit and an RF induction anneali
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::71ef77b51bcba7547074622f9d99d95b
https://doi.org/10.1143/jjap.46.5342
https://doi.org/10.1143/jjap.46.5342
