Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Mitsunori Toyoda"'
Publikováno v:
Japanese Journal of Applied Physics. 62:050901
A high-irradiance illumination system with normal-incidence multilayer mirrors is developed. The system consists of two concave Mo/Si multilayer mirrors with aspherical substrates that provide critical illumination by imaging a laser-produced plasma
Publikováno v:
Optik. 249:168189
In calculations of the point spread function, conservation of energy between the pupil plane and image plane should be satisfied. However, the conventional treatment is inadequate especially for quantitative theoretical inference (Shibuya and Ooki, 2
Publikováno v:
Japanese Journal of Applied Physics. 60:087005
Extreme ultraviolet (EUV) lithography has recently been utilized as a high-volume manufacturing technology for advanced semiconductors. An EUV mirror can be easily contaminated in the existence of a residual hydrocarbon vapor gas inside an exposure c
Publikováno v:
Optics Communications. 405:312-317
On imaging for full-field extreme ultraviolet microscopy, the Fresnel number on the image plane falls below unity since a high magnification objective remarkably reduces the numerical aperture on the image plane, while the Fresnel number on the objec
Publikováno v:
EUV and X-ray Optics: Synergy between Laboratory and Space VI.
To bring global optimization capability on optical design of a focusing objective in soft X-ray region, we describe novel design approach by combining analytical and numerical methods based on geometric optics. We assume two-spherical mirror objectiv
Staining-free observation of polymer blend thin films on transmission extreme ultraviolet microscopy
Autor:
Jun Chen, Toshiyuki Kakudate, Shiori Gondai, Mitsunori Toyoda, Shunsuke Aizawa, Hiroshi Jinnai, Masaki Ageishi
Publikováno v:
Applied Physics Express. 13:082011
Transmission extreme ultraviolet microscopy is applied to the staining-free observation of a poly(styrene–methyl methacrylate) (PS/PMMA) blend. At a photon energy of 92 eV, the imaginary part of the atomic scattering factor for oxygen, which repres
Autor:
Mitsunori Toyoda
Publikováno v:
Advanced Optical Technologies. 4:339-346
To apply high-definition microscopy to the extreme ultraviolet (EUV) region in practice, i.e. to enable in situ observation of living tissue and the at-wavelength inspection of lithography masks, we constructed a novel reflective objective made of th
Autor:
Mitsunori Toyoda
Publikováno v:
Optical Review. 18:441-447
Approximate equations are derived for imaging aberrations of two-aspherical-mirror aplanats for soft X-ray imaging. These expressions include the Seidel terms for unperturbed states and the axial coma resulting from the tilt and decenter of the mirro
Autor:
Artem Rudenko, M. Yanagihara, Hironobu Fukuzawa, A. Czasch, Joachim Ullrich, Hiroshi Iwayama, A. Higashiya, Misaki Okunishi, Reinhard Dörner, Lutz Foucar, Masayuki Yamamoto, T. Ishikawa, O. Jagutzki, Haruhiko Ohashi, Mitsunori Toyoda, X.-J. Liu, Hisamichi Kimura, Kiyonobu Nagaya, Georg Prümper, Mingfa Yao, M. Nagasono, Koji Motomura, Makina Yabashi, Kiyoshi Ueda, Norio Saito, Horst Schmidt-Böcking, T. Harada, K. Shimada
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 606:770-773
We have developed a dead-time free ion momentum spectroscopy technique that allows us to extract 3D momentum for each of up to 100 ions produced by a single free-electron-laser (FEL) shot, by reading signals from the three-layer delay-line detector b
Autor:
Mitsunori Toyoda, Masaki Yamamoto
Publikováno v:
Optical Review. 13:149-157
A new analytical method of designing two-aspherical-mirror anastigmats was developed and applied to searching solution groups of soft X-ray microscopes of a large misalignment tolerance. The two-mirror anastigmat configurations were expressed by a pr