Zobrazeno 1 - 10
of 37
pro vyhledávání: '"Mitsunori Toyoda"'
Publikováno v:
Japanese Journal of Applied Physics. 62:050901
A high-irradiance illumination system with normal-incidence multilayer mirrors is developed. The system consists of two concave Mo/Si multilayer mirrors with aspherical substrates that provide critical illumination by imaging a laser-produced plasma
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09d814990a1583e2347c7fa936f85b18
https://doi.org/10.35848/1347-4065/accd32
https://doi.org/10.35848/1347-4065/accd32
Publikováno v:
Optik. 249:168189
In calculations of the point spread function, conservation of energy between the pupil plane and image plane should be satisfied. However, the conventional treatment is inadequate especially for quantitative theoretical inference (Shibuya and Ooki, 2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7820df8cca747d6394b0904095a8937b
https://doi.org/10.1016/j.ijleo.2021.168189
https://doi.org/10.1016/j.ijleo.2021.168189
Publikováno v:
Japanese Journal of Applied Physics. 60:087005
Extreme ultraviolet (EUV) lithography has recently been utilized as a high-volume manufacturing technology for advanced semiconductors. An EUV mirror can be easily contaminated in the existence of a residual hydrocarbon vapor gas inside an exposure c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51f6e7d6a808ff806eb2602b3f209d52
https://doi.org/10.35848/1347-4065/ac15ef
https://doi.org/10.35848/1347-4065/ac15ef
Publikováno v:
Optics Communications. 405:312-317
On imaging for full-field extreme ultraviolet microscopy, the Fresnel number on the image plane falls below unity since a high magnification objective remarkably reduces the numerical aperture on the image plane, while the Fresnel number on the objec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c3e33814f57bdacb67ebb0e5d63eab51
https://doi.org/10.1016/j.optcom.2017.08.031
https://doi.org/10.1016/j.optcom.2017.08.031
Publikováno v:
EUV and X-ray Optics: Synergy between Laboratory and Space VI.
To bring global optimization capability on optical design of a focusing objective in soft X-ray region, we describe novel design approach by combining analytical and numerical methods based on geometric optics. We assume two-spherical mirror objectiv
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b65d1d1a504992a1a6a8ac790bdd08f
https://doi.org/10.1117/12.2520543
https://doi.org/10.1117/12.2520543
Staining-free observation of polymer blend thin films on transmission extreme ultraviolet microscopy
Autor:
Jun Chen, Toshiyuki Kakudate, Shiori Gondai, Mitsunori Toyoda, Shunsuke Aizawa, Hiroshi Jinnai, Masaki Ageishi
Publikováno v:
Applied Physics Express. 13:082011
Transmission extreme ultraviolet microscopy is applied to the staining-free observation of a poly(styrene–methyl methacrylate) (PS/PMMA) blend. At a photon energy of 92 eV, the imaginary part of the atomic scattering factor for oxygen, which repres
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fb0f65241abcf2d56ebd7e1a2fc188b
https://doi.org/10.35848/1882-0786/aba882
https://doi.org/10.35848/1882-0786/aba882
Autor:
Mitsunori Toyoda
Publikováno v:
Advanced Optical Technologies. 4:339-346
To apply high-definition microscopy to the extreme ultraviolet (EUV) region in practice, i.e. to enable in situ observation of living tissue and the at-wavelength inspection of lithography masks, we constructed a novel reflective objective made of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ccdfd52e84fdfb183726d1707d4a6e4a
https://doi.org/10.1515/aot-2015-0020
https://doi.org/10.1515/aot-2015-0020
Autor:
Mitsunori Toyoda
Publikováno v:
Optical Review. 18:441-447
Approximate equations are derived for imaging aberrations of two-aspherical-mirror aplanats for soft X-ray imaging. These expressions include the Seidel terms for unperturbed states and the axial coma resulting from the tilt and decenter of the mirro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38b777bf552461caeef1eeeb05f06d9a
https://doi.org/10.1007/s10043-011-0083-2
https://doi.org/10.1007/s10043-011-0083-2
Autor:
Artem Rudenko, M. Yanagihara, Hironobu Fukuzawa, A. Czasch, Joachim Ullrich, Hiroshi Iwayama, A. Higashiya, Misaki Okunishi, Reinhard Dörner, Lutz Foucar, Masayuki Yamamoto, T. Ishikawa, O. Jagutzki, Haruhiko Ohashi, Mitsunori Toyoda, X.-J. Liu, Hisamichi Kimura, Kiyonobu Nagaya, Georg Prümper, Mingfa Yao, M. Nagasono, Koji Motomura, Makina Yabashi, Kiyoshi Ueda, Norio Saito, Horst Schmidt-Böcking, T. Harada, K. Shimada
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 606:770-773
We have developed a dead-time free ion momentum spectroscopy technique that allows us to extract 3D momentum for each of up to 100 ions produced by a single free-electron-laser (FEL) shot, by reading signals from the three-layer delay-line detector b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d7bc0bc3ea353e495b1630a159dcb1a4
https://doi.org/10.1016/j.nima.2009.04.042
https://doi.org/10.1016/j.nima.2009.04.042
Autor:
Mitsunori Toyoda, Masaki Yamamoto
Publikováno v:
Optical Review. 13:149-157
A new analytical method of designing two-aspherical-mirror anastigmats was developed and applied to searching solution groups of soft X-ray microscopes of a large misalignment tolerance. The two-mirror anastigmat configurations were expressed by a pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::caa5f4e062e937d5201057bd677984e9
https://doi.org/10.1007/s10043-006-0149-8
https://doi.org/10.1007/s10043-006-0149-8