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pro vyhledávání: '"Mitsinakis, A."'
Autor:
Girginoudi, D. *, Mitsinakis, A., Kotsani, M., Georgoulas, N., Thanailakis, A., Kontos, A.G., Stergiou, V.C., Raptis, Y.S.
Publikováno v:
In Journal of Non-Crystalline Solids 2004 343(1):54-60
Autor:
Nikolaos Georgoulas, A. Mitsinakis, V. C. Stergiou, D. Girginoudi, Adonios Thanailakis, Athanassios G. Kontos, M. Kotsani, Yannis S. Raptis
Publikováno v:
Journal of Non-Crystalline Solids. 343:54-60
The mechanical and structural properties of as-deposited polycrystalline Si films, grown by rapid thermal processing low-pressure chemical vapor deposition at a high deposition rate of 0.4 μm/min on oxidized Si wafer substrates, were investigated us
Publikováno v:
Microelectronics, Microsystems and Nanotechnology.
Publikováno v:
Microelectronics, Microsystems & Nanotechnology: Papers Presented of At Mmn 2000; 2001, p119-122, 4p