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Publikováno v:
Thin Solid Films. 287:51-56
The difference in the operational properties between r.f. conventional diode (CD) and planar magnetron (PM) sputterings has been studied. The PM mode of operation is obtained by setting a circular permanent magnet on a copper plate back of the target
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95613cfb99c1b6a36183220c8cac059e
https://doi.org/10.1016/s0040-6090(96)08738-x
https://doi.org/10.1016/s0040-6090(96)08738-x
