Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Minoru Sugiyama"'
Publikováno v:
Journal of Polymer Science Part A: Polymer Chemistry. 38:3369-3377
Poly[N-(2-hydroxypropyl)methacrylamide]s (PHPMAs) with one pendant cholesteryl moiety at the polymer end and two pendant cholesteryl moieties at both polymer ends as terminal groups (PHPMA-Chol and PHPMA-2Chol) were prepared by the radical polymeriza
Synthesis of well-defined polystyrene with multi-functional end groups utilizing cyclotriphosphazene
Publikováno v:
Macromolecular Rapid Communications. 18:225-231
Telechelic polystyrenes with five benzyl chloride moieties at the polymer end (PSt-E) were prepared by coupling reaction of polystyryllithium with hexakis(4-chloromethyl-phenoxy)cyclotriphosphazene (4). The coupling reaction occurs almost quantitativ
Autor:
Teruo Tamanoi, Minoru Sugiyama
Publikováno v:
Journal of the Surface Finishing Society of Japan. 43:1035-1039
Publikováno v:
Advances in Resist Materials and Processing Technology XXV.
This study reports on stain defect reduction on KrF, ArF and Immersion resist system. Stain defects that appear after develop are a common problem with i-line, KrF, ArF and ArF-immersion resists. Last year we reported a reduction of this type of defe
Autor:
Stephan Sinkwitz, Manuel Jaramillo, Gene Everad Parris, Masakazu Sanada, Patrick Wong, S. Wang, Minoru Sugiyama
Publikováno v:
SPIE Proceedings.
With the introduction of immersion lithography into IC manufacturing for the 45nm node, pattern collapse and line width roughness (LWR) remain critical challenges that can be addressed by implementing formulated surface conditioners. Surface conditio
Publikováno v:
SPIE Proceedings.
One key challenge in sub-100 nm lithography is line pattern collapse. Pattern collapse has become an obstacle in device manufacturing processes requiring dense-high aspect ratio resist lines. In addition to pattern collapse, defect control continues
Publikováno v:
Bioscience, biotechnology, and biochemistry. 63(12)
The 16-kDa rice allergen, RA17, belonging to the alpha-amylase/trypsin inhibitor family was isolated from rice seed and structurally characterized by identifying cystine-containing peptides and predicting the secondary structure and hydrophobic regio
Publikováno v:
The Proceedings of the Fluids engineering conference. 2003:234
Publikováno v:
Journal of Applied Polymer Science; Mar2007, Vol. 103 Issue 5, p3064-3075, 12p
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