Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Minoru Naitoh"'
Autor:
Minoru Naitoh
Publikováno v:
Okayama Igakkai Zasshi (Journal of Okayama Medical Association). 105:165-172
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::504bd0045d0b6d44d47405fe59bfba51
https://doi.org/10.4044/joma1947.105.1-2_165
https://doi.org/10.4044/joma1947.105.1-2_165
Autor:
Minoru Naitoh, Sachiko Ishikita, Hiroyuki Miyashita, Toshiharu Nishimura, Naoya Hayashi, Masaaki Kurihara, M. Katoh, Kazuo Suwa, Norihiro Tarumoto, Tatsuya Tomita, Hiroyuki Nakamura, D. Tagaya
Publikováno v:
Photomask and X-Ray Mask Technology.
A half-tone phase shift mask process has been developed. The writing and process for normal masks are found to be applicable to HT-PSMs. A dry etch process has been adopted to etch the shifter. Several characteristics of HT-PSMs such as CD uniformity
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0324613713143c928b1a6ca0de7d0fd6
https://doi.org/10.1117/12.191937
https://doi.org/10.1117/12.191937
Autor:
Mitsuo Kuriyama, Kazuo Kakii, Hiroshi Sadohara, Minoru Naitoh, Mitsuo Matsumura, Masako Nomura
Publikováno v:
Journal of Fermentation and Bioengineering. 76:535
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f79212baea1eb05c5cb4f86a4b4d35eb
https://doi.org/10.1016/0922-338x(93)90260-f
https://doi.org/10.1016/0922-338x(93)90260-f