Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Minna Kröger-Laukkanen"'
Publikováno v:
Applied Surface Science. 183:290-300
Surface reactions between bis(cyclopentadienyl)zirconium dichloride (Cp 2 ZrCl 2 ) and porous SiO 2 surface were studied by preparing series of samples by saturated gas–solid reactions in an atomic layer epitaxy (ALE) reactor. Partially dehydroxyla
Autor:
Kimmo Hakala, Santeri Paavola, Anne-Marja Uusitalo, Minna Kröger-Laukkanen, Lauri Niinistö, Barbro Löfgren, Tuula T. Pakkanen
Publikováno v:
Journal of Molecular Catalysis A: Chemical. 160:343-356
Heterogeneous metallocene catalysts were prepared by adsorbing rac -Et(Ind) 2 ZrCl 2 on a modified silica surface in solution. The modification of silica was conducted in gas phase with atomic layer chemical vapor deposition (ALCVD) technique, where
Publikováno v:
Applied Surface Science. 157:151-158
Feasibility of metallic thin film growth by atomic layer epitaxy (ALE) was studied in the case of divalent metal β-diketonate-type precursor M(acac)2 (M=Ni, Cu and Pt) at 250°C and 1 mbar. Metallic films were obtained by two different approaches: (
Publikováno v:
Materials Science and Engineering: B. 54:98-103
Nickel oxide thin film formation by atomic layer epitaxy (ALE) was studied including aspects of surface chemistry and structure of the prepared films. The applied source materials were Ni(acac)2, Ni(apo)2, Ni(dmg)2 and O2, H2O, N2O, O3, CH3COOH for N