Peculiarities of chemical etching of the annealed proton exchange channel waveguides fabricated on Z cut of lithium niobate crystal.

Autor: Kichigin, Vladimir I., Petukhov, Igor V., Mushinsky, Sergey S., Minkin, Alexander M., Oborin, Vladimir A., Shevtsov, Denis I., Volyntsev, Anatoly B.

Publikováno v: International Conference & Seminar of Young Specialists on Micro/Nanotechnologies & Electron Devices; 1/ 1/2012, p234-237, 4p