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Publikováno v:
Micromachines, Vol 15, Iss 11, p 1368 (2024)
As a kind of long-term favorable device, the microelectromechanical system (MEMS) sensor has become a powerful dominator in the detection applications of commercial and industrial areas. There have been a series of mature solutions to address the pos
Externí odkaz:
https://doaj.org/article/fb4db3ed786345e894b942dcad983bff
