Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Ming-Li Ke"'
Autor:
Ray-Hua Horng, Ming-Li Ke, Zhen-Zhun Shu, Ji-Liang Chen, Guan-Wei Chen, Chao-Chih Chang, Chung-Ching Lai, Jean-Yih Tsai
Publikováno v:
2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS.
A novel fabrication process, which uses wafer transfer and micro-electroplating technique, has been proposed and tested. In this paper, the effects of the diaphragm thickness and stress, the air-gap thickness, and the area ratio of acoustic holes to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9e525e049948fedda1e17708cc87414c
https://doi.org/10.1109/dtip.2008.4753025
https://doi.org/10.1109/dtip.2008.4753025
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 8:021160
Traditional ribbon microphones cannot be miniaturized owing to the sensitivity of the microphone in proportion to its ribbon length. A novel symmetrical voice coil instead of the traditional ribbon is proposed, designed, and optimized. The new struct
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3183f26a9b9c2a81cf2ac50b02b3534a
https://doi.org/10.1117/1.3142971
https://doi.org/10.1117/1.3142971
Autor:
Zhen-Zhun Shu, Ming-Li Ke, Guan-Wei Chen, Ray-Hua Horng, Chao-Chih Chang, Jean-Yih Tsai, Chung-Ching Lai, Ji-Liang Chen
Publikováno v:
2008 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS; 2008, p386-390, 5p
Publikováno v:
Journal of Micro/Nanolithography, MEMS & MOEMS; Apr2009, Vol. 8 Issue 2, p021160-021160-5, 1p
Autor:
Ming-Li Ker, 柯銘禮
94
Thin-film properties and diffusion barrier characteristics of TaCoN films on silicon substrate prepared by a dc reactive magnetron sputtering at different nitrogen partial pressures are investigated. This work examines the sputtering nitrogen
Thin-film properties and diffusion barrier characteristics of TaCoN films on silicon substrate prepared by a dc reactive magnetron sputtering at different nitrogen partial pressures are investigated. This work examines the sputtering nitrogen
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/af545b
