Zobrazeno 1 - 10
of 117
pro vyhledávání: '"Ming-Huang Li"'
Autor:
Ming-Huang Li
Publikováno v:
Frontiers in Mechanical Engineering, Vol 8 (2022)
Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics. By adopting the existing layer in the complementary meta
Externí odkaz:
https://doaj.org/article/bd6d247bf59b41f3b443d9c7ad3fb99d
Autor:
Yan-Ming Huang, Chin-Yu Chang, Tzu-Hsuan Hsu, Yenshih Ho, Yung-Hsiang Chen, Yelehanka R. Pradeep, Rakesh Chand, Sheng-Shian Li, Weileun Fang, Ming-Huang Li
Publikováno v:
IEEE Transactions on Microwave Theory and Techniques. :1-13
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f8c01d86ef8ff115ceb1c195bd802928
https://doi.org/10.1109/tmtt.2023.3263390
https://doi.org/10.1109/tmtt.2023.3263390
Autor:
Shao-Siang Tung, Tzu-Hsuan Hsu, Yens Ho, Yung-Hsiang Chen, Yelehanka R. Pradeep, Rakesh Chand, Ming-Huang Li
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::091a8e334e4ccf23e3e5fe162c5128bc
https://doi.org/10.1109/mems49605.2023.10052454
https://doi.org/10.1109/mems49605.2023.10052454
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae43b005d9be5bd2bf0ae2d246080141
https://doi.org/10.1109/mems49605.2023.10052342
https://doi.org/10.1109/mems49605.2023.10052342
Publikováno v:
IEEE Electron Device Letters. 42:1045-1048
This letter presents the first nano-gap microelectromechanical systems (MEMS) resonator based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop an improved mask-less post-CMOS process to chemically remove the thin alum
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a76cd668dec1abdb066697d16558f02d
https://doi.org/10.1109/led.2021.3081365
https://doi.org/10.1109/led.2021.3081365
Publikováno v:
3D and Circuit Integration of MEMS
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17627fa6a7bf275e0caa5c4bca7009c2
https://doi.org/10.1002/9783527823239.ch8
https://doi.org/10.1002/9783527823239.ch8
Autor:
Tzu-Hsuan Hsu, Shao-Siang Tung, Yan-Ming Huang, Guan-Lin Wu, Chin-Yu Chang, Yens Ho, Yung-Hsiang Chen, Yelehanka Pradeep, Rakesh Chand, Ming-Huang Li
Publikováno v:
Journal of Micromechanics and Microengineering. 33:054001
This work investigates a co-design approach for fundamental symmetric Lamb wave (S0) resonators (LWR) and film bulk acoustic wave resonators (FBAR) in a commercial 8-inch aluminum nitride (AlN) microelectromechanical system (MEMS) platform to enable
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b25ee88ec67ea7632098ed93d613c3a7
https://doi.org/10.1088/1361-6439/acbfc1
https://doi.org/10.1088/1361-6439/acbfc1
Autor:
Ming-Huang Li
Publikováno v:
Nature Electronics. 5:545-546
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44fabfd4362fa89c2bd2d2c960ff3a4a
https://doi.org/10.1038/s41928-022-00837-4
https://doi.org/10.1038/s41928-022-00837-4
Autor:
Chin-Yu Chang, Yan-Ming Huang, Tzu-Hsuan Hsu, Yung-Hsiang Chen, Rakesh Chand, Yelehanka Ramachandramurthy Pradeep, Yens Ho, Ming-Huang Li, Weileun Fang, Sheng-Shian Li
Publikováno v:
2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c2ae4f41e3f4c81e96be90eeac79de6
https://doi.org/10.1109/eftf/ifcs54560.2022.9850761
https://doi.org/10.1109/eftf/ifcs54560.2022.9850761