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of 216
pro vyhledávání: '"Ming-Huang Li"'
Autor:
Ming-Huang Li
Publikováno v:
Frontiers in Mechanical Engineering, Vol 8 (2022)
Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics. By adopting the existing layer in the complementary meta
Externí odkaz:
https://doaj.org/article/bd6d247bf59b41f3b443d9c7ad3fb99d
Autor:
Yan-Ming Huang, Chin-Yu Chang, Tzu-Hsuan Hsu, Yenshih Ho, Yung-Hsiang Chen, Yelehanka R. Pradeep, Rakesh Chand, Sheng-Shian Li, Weileun Fang, Ming-Huang Li
Publikováno v:
IEEE Transactions on Microwave Theory and Techniques. :1-13
Autor:
Shao-Siang Tung, Tzu-Hsuan Hsu, Yens Ho, Yung-Hsiang Chen, Yelehanka R. Pradeep, Rakesh Chand, Ming-Huang Li
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publikováno v:
IEEE Electron Device Letters. 42:1045-1048
This letter presents the first nano-gap microelectromechanical systems (MEMS) resonator based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop an improved mask-less post-CMOS process to chemically remove the thin alum
Publikováno v:
3D and Circuit Integration of MEMS
Autor:
Tzu-Hsuan Hsu, Shao-Siang Tung, Yan-Ming Huang, Guan-Lin Wu, Chin-Yu Chang, Yens Ho, Yung-Hsiang Chen, Yelehanka Pradeep, Rakesh Chand, Ming-Huang Li
Publikováno v:
Journal of Micromechanics and Microengineering. 33:054001
This work investigates a co-design approach for fundamental symmetric Lamb wave (S0) resonators (LWR) and film bulk acoustic wave resonators (FBAR) in a commercial 8-inch aluminum nitride (AlN) microelectromechanical system (MEMS) platform to enable
Autor:
Ming-Huang Li
Publikováno v:
Nature Electronics. 5:545-546
Autor:
Chin-Yu Chang, Yan-Ming Huang, Tzu-Hsuan Hsu, Yung-Hsiang Chen, Rakesh Chand, Yelehanka Ramachandramurthy Pradeep, Yens Ho, Ming-Huang Li, Weileun Fang, Sheng-Shian Li
Publikováno v:
2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS).
Publikováno v:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 67:1448-1461
We present the first group of GHz low-loss acoustic radio frequency (RF) couplers using the fundamental symmetric (S0) mode in X-cut lithium niobate thin films. The demonstrated multistrip couplers (MSCs) significantly surpass the insertion loss (IL)