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Autor:
Hsien T. Chiu, Chen H. Wang, Karnthidaporn Wattanakul, Tanapon Sukachonmakul, Yu H. Wang, Ming T. Kuo
Publikováno v:
Applied Surface Science. 292:319-327
Amorphous silicon oxycarbide (SiOC) and silicon oxynitrocarbide (SiONC) ceramic films coated aluminum nitride (AlN) were prepared by using preceramic-polysilazane (PSZ) with dip-coating method, followed by pyrolysis at 700 °C in different (air, Ar,