Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Min-Seob Han"'
Publikováno v:
International Journal of Control, Automation and Systems. 14:1528-1534
Instantaneous center (IC) analysis of a mechanism is very important in mechanism analysis, since the analysis gives intuition about the global movement of the mechanism, and the analysis also makes the numerical analysis of velocities faster. Previou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::454ab477f98ba3d683101b6629552940
https://doi.org/10.1007/s12555-015-0066-3
https://doi.org/10.1007/s12555-015-0066-3
Autor:
Sang-Wook Kim, Donggyu Yim, Choi-Dong Kim, Byeong-Ho Cho, Jan van Schoot, Jae-Sung Choi, Ho-Young Heo, Chanha Park, Gyu-Han Yoon, Dong-Duk Lee, Jae-Hak Choi, Min-Seob Han, Young-dae Kim, Yong-Chul Shin, Seung-Hyuk Lee, Thomas Theeuwes, Jungchan Kim, Jongkyun Hong, Tae-Hwa Yu, Hyunjo Yang, Khil-Ohk Kang, Young-Hong Min
Publikováno v:
SPIE Proceedings.
One of the crucial factors to take mostly into account the development and production of 130 nm node in low k1 DRAM process is the lens aberration sensitivity control of optical lithographic tools. To meet the required specification these impact of l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6fe078739706d1ebb2c7ac4e43f4cae
https://doi.org/10.1117/12.474633
https://doi.org/10.1117/12.474633
Publikováno v:
International Journal of Control, Automation & Systems; Dec2016, Vol. 14 Issue 6, p1528-1534, 7p