Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Milt Godwin"'
Autor:
Doron Arazi, Aaron Cordes, Pete Lipscomb, Kye-Weon Kim, Victor Vartanian, Milt Godwin, Benjamin Bunday, John Allgair, Michael Bishop
Publikováno v:
ECS Transactions. 18:151-160
Successful in-line metrology is imperative for a fab to achieve profitable production yields. Full functionality and high circuit speed are achieved only through control of defectivity and tight distributions of feature sizes. In-line monitoring of a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::375a11807c4afc469edbd828596c3351
https://doi.org/10.1149/1.3096443
https://doi.org/10.1149/1.3096443
