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pro vyhledávání: '"Milan Matjěka"'
Autor:
Jan Bok, Vladimír Kolařík, Michal Urbánek, Vladislav Krzyránek, Miroslav Horáček, Milan Matjěka
Publikováno v:
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In this paper, we present four measurement methods for the two-dimensional mapping of the current density distribution in variable-shaped e-beam writers. All the methods use only the native equipment of the e-beam writer which provides the advantage
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::334659e3f990bdcdaeb2f329a1e8e3a6
https://doi.org/10.1016/j.mee.2015.09.013
https://doi.org/10.1016/j.mee.2015.09.013
