Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Mikinari Takada"'
Publikováno v:
Micromachines, Vol 15, Iss 2, p 256 (2024)
In this study, a micropowder blasting system with varying processing temperatures was proposed to control the cross-sectional shape of a channel processed on a glass substrate. Based on an analysis of the processing temperature-dependence of the dyna
Externí odkaz:
https://doaj.org/article/f3ca267ba5e7434f8e672d3dae3a67fc
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
New micropowder blasting system with controlling a mask temperature was proposed to realize a control of cross-sectional shape of the processing channel on a glass substrate. From an analysis of processing temperature dependence of dynamic viscoelast
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4dfb5f96754c4542e99a375e4d80888c
https://doi.org/10.1109/transducers50396.2021.9495397
https://doi.org/10.1109/transducers50396.2021.9495397