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pro vyhledávání: '"Mikhail Treger"'
Autor:
Jean Jordan-Sweet, Eric Eisenbraun, Christian Witt, Mikhail Treger, Cyril Cabral, Ismail C. Noyan, Robert Rosenberg, Conal E. Murray
Publikováno v:
Thin Solid Films. 615:107-115
Room temperature recrystallization responses of blanket electroplated Cu thin films deposited under various conditions were monitored in real-time using synchrotron X-ray diffraction. Nominal control of electroplating parameters such as plating curre
Autor:
Ismail C. Noyan, Jean Jordan-Sweet, Eric Eisenbraun, Robert Rosenberg, C. Cabral, Mikhail Treger, Christian Witt, Conal E. Murray
Publikováno v:
Journal of Applied Physics. 113:214904
Concurrent in-situ four-point probe resistivity and high resolution synchrotron x-ray diffraction measurements were used to characterize room temperature recrystallization in electroplated Cu thin films. The x-ray data were used to obtain the variati
Publikováno v:
Journal of Applied Physics. 113:203515
The microstructural evolution within plated Cu films has been investigated using high-resolution x-ray diffraction, revealing a change in strain state within the recrystallized grains and the surrounding matrix with time. By approximating the case of