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pro vyhledávání: '"Mikhail Tarkhov"'
Autor:
Julia Bondareva, Ekaterina Timofeeva, Alexandr Anikanov, Maxim Krasilnikov, Maxim Shibalov, Vasily Sen, Alexander Mumlyakov, Stanislav Evlashin, Mikhail Tarkhov
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of the key issues in achieving a good balance between lithography and etch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ed2368706df0d08486e4990473919690
http://arxiv.org/abs/2110.13639
http://arxiv.org/abs/2110.13639
