Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Mikhail Mikhov"'
Publikováno v:
2019 IEEE International Ultrasonics Symposium (IUS).
Al 0.7 Sc 0.3 N films were reactively sputtered from AlSc segmented targets by ac poweredde S-gun magnetron. 0.5-2.0 µm thick films with homogeneous Sc concentration within 30 +/- 0.5 at. % across 200-mm wafers were grown at ambient temperature dire
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c0de292a0d8b534a7fb1c0a5a3962b56
https://doi.org/10.1109/ultsym.2019.8925576
https://doi.org/10.1109/ultsym.2019.8925576
Autor:
Enrique Iborra, Marta Clement, Jimena Olivares, Valery V. Felmetsger, Teona Mirea, M. DeMiguel-Ramos, Mikhail Mikhov
Publikováno v:
2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum.
In this work, we describe a sputter technique enabling deposition of AlScN thin films with homogeneous thickness and composition on production size wafers (150–200 mm) and present some preliminary results on the assessment of the structural and pie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fe6cb09e7f7000944dec45627dd291f
https://doi.org/10.1109/fcs.2015.7138803
https://doi.org/10.1109/fcs.2015.7138803
Autor:
Mikhail Mikhov, Enrique Iborra, Valeriy Felmetsger, Marta Clement, J. Capilla, Jimena Olivares
Publikováno v:
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC).
In this paper we analyze the effects of doping AlN films with vanadium and tantalum to concentrations up to 6% atomic. The structure and composition of the new compounds are assessed as a function of the dopant concentration by x-ray diffraction (XRD
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1f4cb8ba028ee8f3b0edb3c5132795a
https://doi.org/10.1109/eftf-ifc.2013.6702211
https://doi.org/10.1109/eftf-ifc.2013.6702211
Autor:
Violeta Kassabova-Zhetcheva, Lilyana Pavlova, Bisserka Samuneva, Zara Cherkezova-Zheleva, Ivan Mitov, Mikhail Mikhov
Publikováno v:
Central European Journal of Chemistry; Mar2007, Vol. 5 Issue 1, p107-117, 11p