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pro vyhledávání: '"Mikhail A. Ilnitskii"'
Autor:
Kristina A. Malsagova, Tatyana O. Pleshakova, Andrey F. Kozlov, Ivan D. Shumov, Mikhail A. Ilnitskii, Andrew V. Miakonkikh, Vladimir P. Popov, Konstantin V. Rudenko, Alexander V. Glukhov, Igor N. Kupriyanov, Nina D. Ivanova, Alexander E. Rogozhin, Alexander I. Archakov, Yuri D. Ivanov
Publikováno v:
Biosensors, Vol 8, Iss 3, p 72 (2018)
Application of micro-Raman spectroscopy for the monitoring of quality of high-k (h-k) dielectric protective layer deposition onto the surface of a nanowire (NW) chip has been demonstrated. A NW chip based on silicon-on-insulator (SOI) structures, pro
Externí odkaz:
https://doaj.org/article/10bab3cd530d48258be7c21b7d47ceff
