Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Mike Xu Ouyang"'
Publikováno v:
Fourth International Conference on Thin Film Physics and Applications.
Sputter deposition process conditions for dielectric metal oxide films was simulated by SIMSPUDTM (Simulation of Sputtered Distributions). Collision cross-sections of Nb and Si were found to be 50 angstroms2 and 55 angstroms2 respectively by pinhole
Publikováno v:
Fourth International Conference on Thin Film Physics and Applications.
We report a unique technique to measure the refractive index (n), extinction coefficient (k), and thickness of thin films based on either the reflection or transmission spectra. The method combines a spectrometer, an optical microscope and a video ca