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pro vyhledávání: '"Mike Radler-Carol"'
Autor:
Mike Radler-Carol, Jason Niu, Brian G. Landes, Jerry L. Hahnfeld, Dorie Yontz, J. P. Quintana, Sebring Lucero, Brandon Kern, Danny King, Ted Stokich, Steve Weigand, Mohler Kacee Ouellette
Publikováno v:
MRS Proceedings. 766
The continual drive for faster interconnects requires the development of new interlayer dielectricmaterials with k values less than 2.1. Porous SiLKTM semiconductor dielectric resin wasdeveloped to achieve these low dielectric constants by introducin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::93c19e768ca416d6983d2e8c9cd5e9e7
https://doi.org/10.1557/proc-766-e9.10
https://doi.org/10.1557/proc-766-e9.10
