Zobrazeno 1 - 1
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pro vyhledávání: '"Mike Pauzer"'
Publikováno v:
SPIE Proceedings.
The lack of calibrated resist models has lead to a reliance on aerial images. This has limited capability of simulation to predict printed image shapes and CDs, especially in low K1 regimes. Calibration of resist models for matching simulation to pat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e9f2ce94794247d10b185c54f8adc754
https://doi.org/10.1117/12.485339
https://doi.org/10.1117/12.485339
