Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Mike Hyatt"'
Autor:
Vinay Nair, Xu Xie, Eric Janda, Zhongchang Yu, Rafael Aldana, Anton J. deVilliers, Yuan He, Mike Hyatt, Erik Byers, Y. Cao, Tjitte Nooitgedagt, Peter Engblom, Hua-yu Liu, Danielle Hines, Wenjin Shao, Junwei Lu, Chang-Qun Ma, Chris Aquino, Scott L. Light, Jianming Zhou, Ronald Goossens
Publikováno v:
SPIE Proceedings.
Scanner matching based on wafer data has proven to be successful in the past years, but its adoption into production has been hampered by the significant time and cost overhead involved in obtaining large amounts of statistically precise wafer CD dat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bffb74cbf9ed804f30a179b56ea81608
https://doi.org/10.1117/12.848255
https://doi.org/10.1117/12.848255
Autor:
Craig Hickman, Peng Liu, Scott L. Light, Mike Hyatt, Bernd Geh, Erik Byers, Dennis de Lang, Yuan He, Eric Wu, Anton J. deVilliers, Peter Engblom, Martin Snajdr, Youping Zhang, Jianming Zhou
Publikováno v:
SPIE Proceedings.
As the industry drives to lower k1 imaging we commonly accept the use of higher NA imaging and advanced illumination conditions. The advent of this technology shift has given rise to very exotic pupil spread functions that have some areas of high the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b41b58c0c55555b1b940f23e4627a36
https://doi.org/10.1117/12.846697
https://doi.org/10.1117/12.846697