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pro vyhledávání: '"Mike D. Kearny"'
Autor:
Mike D. Kearny, Burford J Furman
Publikováno v:
SPIE Proceedings.
A new profiler is under development that uses a commercially available electrostatic device normally used for nanoindentation as its primary sensing element. The new profiler can measure the force applied to the sample and the displacement of the sty