Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Mike C. Broomfield"'
Autor:
Mike C. Broomfield, MaryAnn Piasecki, Sasha K. Dass, Kevin J. Orvek, John Tremblay, Len Gruber
Publikováno v:
SPIE Proceedings.
There are many commercially available deep-UV resists today that show performance gains above Apex, which has been used in 0.35 micrometers production for some time. In addition there are inorganic antireflection layer (ARL) schemes that can now be u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b106f3d28c48147b8e0fcb22c1a7f2f
https://doi.org/10.1117/12.276000
https://doi.org/10.1117/12.276000
Autor:
L. J. Elliott, Spooner Terry A, Mike C. Broomfield, S. P. Baranowski, L. Brooke, James R. Lloyd, Larisa Kisselgof
Publikováno v:
SPIE Proceedings.
Attempts to improve the reliability of narrow passivated Al/Cu conductors as defined by the performance in an accelerated electromigration test are reviewed. The results are explained in terms of the effect of thermally induced stress and stress void
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc056eb230d6ea69ef7a111cc54342bf
https://doi.org/10.1117/12.145478
https://doi.org/10.1117/12.145478
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