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Autor:
Dmitry A. Baklykov, Mihail Andronic, Olga S. Sorokina, Sergey S. Avdeev, Kirill A. Buzaverov, Ilya A. Ryzhikov, Ilya A. Rodionov
Publikováno v:
Micromachines, Vol 12, Iss 5, p 534 (2021)
Advanced microsystems widely used in integrated optoelectronic devices, energy harvesting components, and microfluidic lab-on-chips require high-aspect silicon microstructures with a precisely controlled profile. Such microstructures can be fabricate
Externí odkaz:
https://doaj.org/article/0335927e1de94b8e996e2cd0bb042da8
