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pro vyhledávání: '"Mien-Ta Ng"'
Publikováno v:
2009 IEEE International Integrated Reliability Workshop Final Report.
This paper discusses the process improvements for resolving gate oxide integrity (GOI) issue using the Taguchi method through reliability engineering for eliminating shallow trench isolation (STI) edge failure mode. The selected process parameters ar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99221c41591da7c7270cd3cc56b6852a
https://doi.org/10.1109/irws.2009.5383016
https://doi.org/10.1109/irws.2009.5383016
Publikováno v:
2009 IEEE International Integrated Reliability Workshop Final Report; 2009, p128-131, 4p