Zobrazeno 1 - 10
of 1 784
pro vyhledávání: '"Microlithography"'
Autor:
Zheng, Yu-Qing1, Liu, Yuxin2, Zhong, Donglai, Nikzad, Shayla, Liu, Shuhan, Yu, Zhiao3, Liu, Deyu, Wu, Hung-Chin, Zhu, Chenxin, Li, Jinxing, Tran, Helen, Tok, Jeffrey B.-H., Bao, Zhenan zbao@stanford.edu
Publikováno v:
Science. 7/2/2021, Vol. 373 Issue 6550, p88-94. 7p. 5 Diagrams.
