Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Micro Electronic and Mechanical Systems"'
Autor:
Jovan Matovic, Metallurgy Belgrade
Publikováno v:
Micro Electronic and Mechanical Systems
Since nanomembranes are a novel concept which extends the range of MEMS & NEMS building blocks and practically introduces a new one, this means that whole branches of science and technology can be re-read and re-created through it, which may create a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28518fe272bd2bc421257e10ccf6caf4
http://www.intechopen.com/articles/show/title/nanomembrane-a-new-mems-nems-building-block
http://www.intechopen.com/articles/show/title/nanomembrane-a-new-mems-nems-building-block
Publikováno v:
Micro Electronic and Mechanical Systems
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
In this paper we present a contactless technique for thickness measurement of chemically etched Si membranes. This technique is based on low-coherence interferometry performed by single-mode fiber-optic sensing configuration. We are able to measure t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5581963b21532895289cf85554b4bcf8
https://cer.ihtm.bg.ac.rs/handle/123456789/4442
https://cer.ihtm.bg.ac.rs/handle/123456789/4442
Akademický článek
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
K zobrazení výsledku je třeba se přihlásit.
K zobrazení výsledku je třeba se přihlásit.