Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Michiya Kume"'
Autor:
Kohei Ihara, Michiya Kume, Miyuki Sumitomo, Shuichi Tada, Hideaki Yoshiwara, Tomimoto Takahiro, Muneo Yamamoto
Publikováno v:
Journal of the Japan Institute of Metals. 76:107-111
Publikováno v:
Journal of the Society of Materials Science, Japan. 41:552-556
A new nitriding process titanium furface using the self propagating high temperature synthesis has been developed. A titanium plate was embeded in or coated with the self combustion agent of Nb or Ti metal powders, and the agent was ignited in a pres
Publikováno v:
Japanese Journal of Applied Physics. 24:35
Energetic neutral oxygen atoms bombarding the substrate in DC diode sputtering and DC planar magnetron sputtering were detected by a time-of-flight apparatus. In analyzing the time-of-flight spectrum, the energy distribution of the energetic oxygen a
Publikováno v:
Japanese Journal of Applied Physics. 24:944
Conductive ZnO films were prepared by DC planar magnetron sputtering and DC diode sputtering, and the reason for the high resistivity shown by the films at the substrate positions facing the eroded area of the target was investigated. It was found th
Publikováno v:
Japanese Journal of Applied Physics. 27:2414
The decrease of the deposition rate of SiO2 sputtered films is investigated by using time-of-flight apparatus. It is found that the increase of signal intensity of H atoms corresponds to the decrease of the deposition rate of SiO2 films, which confir
Publikováno v:
Japanese Journal of Applied Physics. 23:936
Publikováno v:
Japanese Journal of Applied Physics. 24:28
Using Zn metal disk target, ZnO films were prepared in Ar+O2 mixed gas by both DC planar magnetron sputtering and RF diode sputtering. The dependence of c-axis orientation of ZnO film on O2 partial pressure was examined from the view point of the bom